Effect of Electrostatic Discharge (ESD) on Heat Response Performance of NiCr Micro-heater

Abstract The NiCr micro-heater is a key element of MEMS-based electro-explosive device (mEED), while electrostatic discharge (ESD) may excite the accidentally. To discover mechanism that how ESD excitations effect on heat response performance micro-heater, electro-thermal conversion process was numerically modelled by using commercial software. Three different shapes micro-heaters, including rectangular, V-shape and square ones, are designed, series simulation models built under events 25kV, 5000Ω, 500pF 500Ω, 150pF. Heat with sizes were computed said compared with. critical safety value at which LTNR copper azide would not be ignited accidentally calculated according to fitted formulas. Conclusions maximum temperature decreases exponentially increase width rectangular wm α length or micro-heater. event 150pF more severe case for than 500pF. These results could supply data guide design MEMS -based EED protection.